Microelectromechanical vibration sensor with optical interconnects

Journal of Microelectromechanical Systems

Volumn 7, Issue 1, 1998, Pages 56-60

  Peiner, Erwin ^a,d   Scholz, Dirk ^a,b   Fricke, Klaus ^a   Schlachetzki, Andreas ^a   Hauptmann, Peter ^c  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b ROBERT BOSCH GMBH   (Germany)

^c OTTO VON GUERICKE UNIVERSITY   (Germany)

^d UNIVERSITY OF BONN   (Germany)

Author keywords

Bulk micromachined piezoresistive transducer; Fiber optical readout; Mechanical vibrations

Indexed keywords

FAILURE ANALYSIS; FIBER OPTIC SENSORS; LIGHT EMITTING DIODES; MACHINE VIBRATIONS; OPTICAL FIBERS; PIEZOELECTRIC TRANSDUCERS; ROTATING MACHINERY; SENSORS; VIBRATION CONTROL; VIBRATION MEASUREMENT; WEAR OF MATERIALS;

BULK MICROMACHINED PIEZORESISTIVE TRANSDUCERS; FIBER OPTICAL READOUTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032026512     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.661384     Document Type: Article

References (20)

1. H. Ellam and D. L. Thomas, "In-service vibration levels on large turbine generators," in Proc. Int. Conf. Vibrations in Rotating Machinery, Edinburgh, U.K., 1988, pp. 419-426.
2. K. Feldmann, J. Göhringer, and F. Pitter, "Tool monitoring of an automated lathe with microsystem technology," in Proc. 5th Intern. Conf. Exhibition on Micro Electro, Opto, Mechanical Syst. Components, Micro Syst. Technologies '96, pp. 163-167.
3. H. Fritsch, R. Lucklum, T. Iwert, P. Hauptmann, D. Scholz, E. Peiner, and A. Schlachetzki, "A low frequency micromechanical resonant vibration sensor for wear monitoring," Sens. Actuators A, vol. 62, pp. 616-620, July 1997.
4. D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta, and P. Hauptmann, "A smart resonant sensor fabricated by Si-MST for on-line vibration control of rotating machinery," in Proc. 26th Europ. Solid State Dev. Res. Conf., ESSDERC '96, pp. 721-724.
5. _, "An on-line vibration control system for rotating machinery based on smart sensors fabricated by Si-MST," in Proc. 5th Intern. Conf. Exhibition on Micro Electro, Opto, Mechanical Syst. Components Micro Syst. Technologies '96, pp. 157-162.
6. F. A. Tooley, "Challenges in optically interconnecting electronics," IEEE J. Select. Topics Quantum Electron., vol. 2, pp. 3-13, Apr. 1996.
7. S. J. Pember, C. M. France, and B. E. Jones, "A multiplexed network of optically powered, addressed and interrogated hybrid resonant sensors," Sens. Actuators A, vols. 46-47, pp. 474-477, 1995.
8. A. J. Jacobs-Cook, "MEMS versus MOMS from a systems point of view," J. Micromech. Microeng., vol. 6, pp. 148-156, 1996.
9. M. Tachikawa, T. Yamada, T. Sasaki, H. Mori, and Y. Kadota, "Laserdiode-quality InP/Si grown by hydride vapor phase epitaxy," Jpn. J. Appl. Phys., vol. 34, pp. L657-L659, June 1995.
10. A. Bartels, E. Peiner, G.-P. Tang, R. Klockenbrink, H.-H. Wehmann, and A. Schlachetzki, "Performance of an InGaAs metal-semiconductor-metal photodetector on Si," IEEE Photon. Technol Lett., vol. 8, pp. 670-672, May 1996.
11. F. Kozlowski, P. Steiner, W. Lang, and H. Sandmeier, "Light-emitting diodes in porous silicon," Sens. Actuators A, vol. 43, pp. 153-156, 1994.
12. J. Kramer, P. Seitz, E. F. Steigmeier, H. Auderset, B. Delley, and H. Baltes, "Light-emitting devices in industrial CMOS technology," Sens. Actuators A, vol. 37-38, pp. 527-533, 1993.
13. O.-S. Yang, S.-C. Hong, and Y.-S. Kwon, "Integration of microlensed LED and double heterojunction bipolar transistors for transmitter OEIC," Electron. Lett., vol. 32, pp. 1821-1823, Sept. 1996.
14. O. Tohyama, M. Kohashi, K. Yamamoto, and H. Itoh, "A fiber-optic pressure sensor for ultra-thin catheders," Sens. Actuators A, vol. 54, pp. 622-625, 1996.
15. 0.47As masks," J. Electrochem. Soc., vol. 141, pp. 1594-1599, 1994.
16. S. Geckeler, Lichtwellenleiter für die Optische Nachrichtenübertragung. New York: Springer, 1986, p. 219.
17. I. W. Berman, "Plasic optical fiber flexes its muscle," Laser Focus World, vol. 32, pp. 129-132, Oct. 1996.
18. N. Nasserbakht, J. W. Adkisson, B. A. Wooley, J. S. Harris, and T. I. Kamins, "A monolithic GaAs-on-Si receiver front end for optical interconnect systems," IEEE J. Solid-State Circuits, vol. 28, pp. 622-630, June 1993.
19. A. Lubnow, G.-P. Tang, H.-H. Wehmann, E. Peiner, and A. Schlachetzki, "The effect of III/V-compound epitaxy on Si-metal-oxide semiconductor circuits," Jpn. J. Appl. Phys., vol. 33, pp. 3628-3634, June 1994.
20. 0.47As," IEEE Trans. Electron Dev., vol. ED-33, pp. 294-297, Feb. 1986.