A smart resonant sensor fabricated by Si MST for online vibration control of rotating machinery

European Solid-State Device Research Conference

Volumn , Issue , 1996, Pages 721-724

  Scholz, D ^a   Peiner, E ^a   Schlachetzki, A ^a   Fritsch, H ^b   Mikuta, R ^b   Hauptmann, P ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Institut für Prozebßmebßtechnik und Elektronik Otto von Guericke Universitadie t Magdeburg   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

RESONANT SENSORS;

EID: 0009790129     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. H. Ellam and D. L. Thomas, Proc. Intern. Conf. on Vibrations in Rotating Machinery, Edinburgh, 1988, 1. Mech. E. Conference Publications, 1988-7, 419-426.
2. H. Mehles, Elektronik Journal 6/93 (1993) 40-50.
3. R. P. Ried, E. S. Kim, D. M. Hong, and R. S. Muller, J. Microelectromechanical Systems 2 (1993) 111-120.
4. Résonantes Schwingungsmeßsystem Omega RX, Zentrum für Angewandte Mikrosystemtechnik (ZAM) GmbH, Frankfurt (Oder), Germany.