Backside optical emission diagnostics for excess IDDQ

IEEE Journal of Solid-State Circuits

Volumn 33, Issue 3, 1998, Pages 508-511

  Kash, J A ^a   Tsang, J C ^a   Rizzolo, Richard F ^b   Patel, Atul K ^c   Shore, Aaron D ^c  

^a IBM RESEARCH   (United States)

^b IBM   (United States)

^c IBM MICROELECTRONICS   (United States)

Author keywords

Failure analysis; Fault diagnosis; Integrated circuit testing; Optical imaging mapping; Semiconductor device reliability

Indexed keywords

FAILURE ANALYSIS; IMAGING TECHNIQUES; INTEGRATED CIRCUIT TESTING; LIGHT EMISSION; RELIABILITY THEORY;

OPTICAL MAPPING;

GATES (TRANSISTOR);

EID: 0032025510     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/4.661218     Document Type: Article

References (10)

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