Residual stress and strains of highly textured ZrN films examined by x-ray diffraction methods

Journal of Physics D: Applied Physics

Volumn 31, Issue 4, 1998, Pages 349-354

  Chiou, S Y ^a   Hwang, Bing H ^a  

^a NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; ELASTICITY; MAGNETRON SPUTTERING; RESIDUAL STRESSES; STAINLESS STEEL; STRAIN; TEXTURES; THERMAL STRESS; TOOL STEEL; X RAY DIFFRACTION ANALYSIS;

ZIRCONIUM NITRIDE;

NITRIDES;

EID: 0032000641     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/4/002     Document Type: Article

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