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Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 692-696

Optical investigations of mixed-phase boron nitride thin films by infrared spectroscopic ellipsometry

(7) Schubert, M a Franke, E a Neumann, H a Tiwald, T E b Thompson, D W b Woollam, J A b Hahn, J c

a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

b UNIVERSITY OF NEBRASKA LINCOLN (United States)

c CHEMNITZ UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

Anisotropy; Effective medium theory; Infrared ellipsometry; Mixed phase thin films

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL MICROSTRUCTURE; CUBIC BORON NITRIDE; ELLIPSOMETRY; INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PHASE COMPOSITION; POLYCRYSTALLINE MATERIALS; SPUTTER DEPOSITION;

EFFECTIVE MEDIUM THEORY; INFRARED ELLIPSOMETRY; MIXED PHASE THIN FILMS;

THIN FILMS;

EID: 0031998637 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00979-6 Document Type: Article

Times cited : (9)

References (14)

1
- 26744445785
- D.W. Berreman, Phys. Rev. 130 (1963) 2193.
- (1963) Phys. Rev. , vol.130 , pp. 2193
- Berreman, D.W.¹

2
- 0000480083
- M.D. Sciacca, A.J. Mayer, E. Oh, et al., Phys. Rev. B 51 (1995) 7744.
- (1995) Phys. Rev. B , vol.51 , pp. 7744
- Sciacca, M.D.¹ Mayer, A.J.² Oh, E.³

3
- 0001621437
- O.E. Piro, Phys. Rev. B36 (1987) 3427.
- (1987) Phys. Rev. , vol.B36 , pp. 3427
- Piro, O.E.¹

4
- 35949039873
- A.S. Barker, Jr., M. Ilegems, Phys. Rev. B7 (1973) 743.
- (1973) Phys. Rev. , vol.B7 , pp. 743
- Barker A.S., Jr.¹ Ilegems, M.²

5
- 43949165475
- J. Humlicek, A. Röseler, Thins Solid Films 234 (1993) 332.
- (1993) Thins Solid Films , vol.234 , pp. 332
- Humlicek, J.¹ Röseler, A.²

6
- 0028392165
- J. Bremer, E. Wold, O. Hunderi, M. Guilloux-Viry, Solid State Commun. 89 (1994) 803.
- (1994) Solid State Commun. , vol.89 , pp. 803
- Bremer, J.¹ Wold, E.² Hunderi, O.³ Guilloux-Viry, M.⁴

7
- 30244511194
- J. Hahn, M. Friedrich, R. Pintaske, et al., Diam. Relat. Mater. 5 (1996) 1103.
- (1996) Diam. Relat. Mater. , vol.5 , pp. 1103
- Hahn, J.¹ Friedrich, M.² Pintaske, R.³

8
- 0346596414
- M. Röder, J. Hahn, U. Falke, S. Schulze, F. Richter, M. Hietschold, Michrochim. Acta 129 (1997) 283.
- (1997) Michrochim. Acta , vol.129 , pp. 283
- Röder, M.¹ Hahn, J.² Falke, U.³ Schulze, S.⁴ Richter, F.⁵ Hietschold, M.⁶

9
- 0005840859
- E. Franke, H. Neumann, M. Schubert, et al., Appl. Phys. Lett. 70 (1997) 1668.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1668
- Franke, E.¹ Neumann, H.² Schubert, M.³

10
- 0001566211
- M. Schubert, B. Rheinländer, E. Franke, et al., Appl. Phys. Lett. 70 (1997) 1819.
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1819
- Schubert, M.¹ Rheinländer, B.² Franke, E.³

11
- 0001118048
- M. Schubert, Phys. Rev. B 53 (1996) 4265.
- (1996) Phys. Rev. B , vol.53 , pp. 4265
- Schubert, M.¹

12
- 4544350416
- R. Geick, C.H. Perry, G. Rupprecht, Rhys. Rev. 146 (1966) 543.
- (1966) Rhys. Rev. , vol.146 , pp. 543
- Geick, R.¹ Perry, C.H.² Rupprecht, G.³

13
- 18844368581
- M. Schubert, B. Rheinländer, E. Franke, et al., Phys. Rov. B 56 (1997) 13306.
- (1997) Phys. Rov. B , vol.56 , pp. 13306
- Schubert, M.¹ Rheinländer, B.² Franke, E.³

14
- 35949035159
- D.E. Aspnes, J.B. Theeten, Phys. Rev. B20 (1979) 3292.
- (1979) Phys. Rev. , vol.B20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.²

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