SCOPUS 정보 검색 플랫폼

Volumn 313-314, Issue , 1998, Pages 124-127

Multiple minima in the ellipsometric error function

Author keywords

Dielectric films; Multiple minima; Spectroscopic ellipsometry

Indexed keywords

ALGORITHMS; CRYSTALLINE MATERIALS; DATA REDUCTION; ELLIPSOMETRY; MEASUREMENT ERRORS; SILICON;

ELLIPSOMETRIC ERROR FUNCTION;

DIELECTRIC FILMS;

EID: 0031998526 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00784-0 Document Type: Article

Times cited : (28)

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