Beam size and collimation effects in spectroscopic ellipsometry of transparent films with optical thickness inhomogeneity

Thin Solid Films

Volumn 288, Issue 1-2, 1996, Pages 125-131

  El Rhaleb, H ^a   Cella, N ^a,d   Roger, J P ^a   Fournier, D ^b   Boccara, A C ^a   Zuber, A ^c  

^a CNRS   (France)

^b SORBONNE UNIVERSITÉ   (France)

^c FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^d STATE UNIVERSITY OF RIO DE JANEIRO   (Brazil)

Author keywords

Diamond; Ellipsometry; Optical coatings; Polymers

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DIAMOND FILMS; ELLIPSOMETRY; OPTICAL COLLIMATORS; OPTICAL PROPERTIES; PLASMA APPLICATIONS; POLYMETHYL METHACRYLATES; SILICA; SPECTROSCOPIC ANALYSIS; THIN FILMS;

INHOMOGENEOUS OPTICAL THICKNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPECTROSCOPIC ELLIPSOMETRY (SE); TRANSPARENT FILMS;

OPTICAL COATINGS;

EID: 0030286545     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08818-9     Document Type: Article

References (8)

1. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
2. R.M.A. Azzam, Selected Papers in Ellipsometry, Vol. MS 27, SPIE Optical Engineering, New Orleans, LA, 1991.
3. A.C. Boccara, C. Pickering and J. Rivory (eds.), Spectroscopic Ellipsometry, in Thin Solid Films, 233-234 (1993).
4. G.E. Jellison, Jr., and J.M. McCamy, Appl. Phys. Lett., 61 (1992) 512-514.
5. P. Shakil, P.G. Snyder and N.J. Ianno, Thin Solid Films, 233 (1991) 286-288.
6. S.Y. Kim and K. Vedam, Appl. Opt., 25 (1986) 2013-2021.
7. C.K. Carniglia, J. Opt. Soc. Am. A, 7 (1990) 848-855.
8. G. Parjadis de Larivière, J.M. Frigerio, J. Rivory and F. Abelès, Appl. Opt., 31 (1992) 6056-6061.