A micromachined vibration sensor based on the control of power transmitted between optical fibres

Sensors and Actuators, A: Physical

Volumn 65, Issue 1, 1998, Pages 23-29

  Peiner, E ^a   Scholz, D ^a,c   Schlachetzki, A ^a   Hauptmann, P ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

^c ROBERT BOSCH GMBH   (Germany)

Author keywords

Optical fibres; Silicon micromachining; Vibration sensors

Indexed keywords

ANISOTROPY; ETCHING; LIGHT EMISSION; LIGHT MODULATION; MICROMACHINING; OPTICAL FIBERS; SILICON; VIBRATION MEASUREMENT;

VIBRATION SENSORS;

OPTICAL SENSORS;

EID: 0031996785     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01643-9     Document Type: Article

References (18)

1. D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta and P. Hauptmann, A smart resonant sensor fabricated by Si MST for online vibration control of rotating machinery, in G. Baccarani and M. Rudan (eds.), Proc. 26th Eur. Solid State Devices Research Conf. (ESSDERC '96), Editions Frontières, Gif-sur-Yvette, France, 1996, pp. 721-724.
2. D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R. Mikuta and P. Hauptmann, An online vibration control system for rotating machinery based on smart sensors fabricated by Si MST, in H. Reichl and A. Heuberger (eds.), Proc. 5th Int. Conf. and Exhibition on Micro Electro, Opto, Mechanical Systems and Components (Micro System Technologies '96), VDE-Verlag, Berlin, 1996, pp. 157-162.
3. A.J. Jacobs-Cook, MEMS versus MOMS from a systems point of view, J. Micromech. Microeng., 6 (1996) 148-156.
4. B. Culshaw, Fibre optic sensor: integration with micromachined devices, Sensors and Actuators A, 46-47 (1995) 463-469.
5. G. Cocorullo, F.G. Della Corte, M. Iodice, I. Rendina and P.M. Sarro, An integrated silicon interferometric temperature sensor, in R. Puers (ed.), Tech. Digest, 10th Eur. Conf. Solid-State Transducers (Eurosensors X), Leuven, Belgium, 8-11 Sept., 1996, pp. 1413-1416.
6. K. Seibert, D. Largeau, B. Bonvalot, D.T. Angelidis and P. Parsons, Optical system for pressure and temperature sensing, Sensors and Actuators A, 43 (1994) 85-91.
7. H. Bartelt and H. Unzeitig, Design and investigation of micromechanical bridge structures for an optical pressure sensor with temperature compensation. Sensors and Actuators A, 37-38 (1993) 167-170.
8. M.A. Chan, S.D. Collins and R.L. Smith, A micromachined pressure sensor with fibre-optic interferometric readout, Sensors and Actuators A, 43 (1994) 196-201.
9. O. Tohyama, M. Kohashi, K. Yamamoto and H. Itoh, A fiber-optic silicon pressure sensor for ultra-thin catheders, Sensors and Actuators A, 54 (1996) 622-625.
10. J. Marty, A. Malki, C. Renouf, P. Lecoy and F. Baillieu, Fibre-optic accelerometer using silicon micromachining techniques, Sensors and Actuators A, 46-47 (1995) 470-473.
11. T. Storgaard-Larsen, S. Bouwstra and O. Leistiko, Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide, Sensors and Actuators A, 52 (1996) 25-32.
12. D. Garthe, Fiber- and integrated-optical microphones based on intensity modulation by beam deflection at a moving membrane, Sensors and Actuators A, 37-38 (1993) 484-488.
13. M. Hoffmann, H. Bezzaoui and E. Voges, Micromechanical cantilever resonators with integrated optical interrogation, Sensors and Actuators A, 44 (1994) 71-75.
14. A.J. Jacobs-Cook and M.E.C. Bowen, Novel optical fibre/microresonator interfacing technology, Sensors and Actuators A, 37-38 (1993) 540-545.
15. S. Geckeler, Lichtwellenleiter für die optische Nachrichtenübertragung, in H. Marko (ed.), Nachrichtentechnik, Vol. 16, Springer, New York, 1986.
16. M. Tabib-Azar and A. Garcia-Valenzuela, Sensing means and sensor shells: a new method of comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors, Sensors and Actuators A, 48 (1995) 87-100.
17. 27.5 films, J. Phys. (Paris) V, Suppl. III, 6 (1996) C8-643.
18. D. Scholz, E. Peiner, A. Schlachetzki, H. Fritsch, R, Mikuta and P. Hauptmann, A micromechanical resonant sensor with optoelectronic read-out for vibration diagnosis of rotating machinery, in T. Lalinský, F. Dubecký, J. Osvald and Š. Haščik (eds.), Proc. Int. Conf. Advanced Semiconductor Devices and Microsystems (ASDAM '96), Smolenice, Slovakia, 20-24 Oct., 1996, pp. 297-300.