Eddy current compensation for magnetic electron lenses

Measurement Science and Technology

Volumn 7, Issue 11, 1996, Pages 1583-1590

  Thong, J T L ^a   Li, Fenglei ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EDDY CURRENTS; ELECTRON LENSES; EXPERIMENTS; FOURIER TRANSFORMS; TRANSFER FUNCTIONS;

EDDY CURRENT COMPENSATION; MAGNETIC ELECTRON LENSES;

MAGNETIC LENSES;

EID: 0030287075     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/11/007     Document Type: Article

References (4)

1. Chung Y, Emery L and Kirchman J 1993 Compensation for the effect of vacuum chamber eddy current by digital signal processing for closed orbit feedback Proc. IEEE Particle Accelerator Conf. vol 3, pp 2266-8
2. Morich M A, Lampman D A, Dannels W R and Goldie F T D 1988 Exact temporal eddy current compensation in magnetic resonance imaging systems IEEE Trans. Medical Imaging 7 247-54
3. Thong J T L and Breton B C 1991 Improving the dynamic response of magnetic electron lenses Meas. Sci. Technol. 2 1116-8
4. Yasutake N, Takahashi Y, Oae Y, Yamada A, Kai J, Yasuda H and Kawashima K 1992 'NOWEL-2' variable-shaped electron beam lithography system for 0.1 μm patterns with refocusing and eddy current compensation Japan. J. Appl. Phys. 31 4241-7