Fabrication of surface-micromachined polysilicon microactuators using HF gas-phase etching process

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 373-376

  Lee, Jong Hyun ^a   Park, Kyung Ho ^a   Lee, Chun Su ^a   Baek, Jong Tae ^a   Kim, Chang Jin ^b   Yoo, Hyung Joun ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILMS;

GAS PHASE ETCHING (GPE); TETRAETHYLORTHOSILICATE (TEOS);

ACTUATORS;

EID: 0030373339     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (18)

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