Characterization of a high-sensitivity micromachined tunneling accelerometer

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 471-472

  Liu, C H ^a   Grade, J D ^a   Barzilai, A M ^a   Reynolds, J K ^a   Partridge, A ^a   Rockstad, H K ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON TUNNELING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; TRANSDUCERS; UNDERWATER ACOUSTICS;

TUNNELING ACCELEROMETERS;

ACCELEROMETERS;

EID: 0030658156     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)