On the gap between design and implementation of MEMS

CIRP Annals - Manufacturing Technology

Volumn 47, Issue 1, 1998, Pages

  Seter, D ^a   Hershkovitz, M ^a   Kaldor, S ^a  

^a NONE

Author keywords

Micro machining; Precision; Silicon

Indexed keywords

MACHINE VIBRATIONS; MICROMACHINING; PRECISION ENGINEERING; PRODUCT DESIGN; SILICON SENSORS;

SILICON MICROSENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031618996     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)62875-3     Document Type: Article

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