Microlinear motion bearing produced by anisotropic etching of silicon

CIRP Annals - Manufacturing Technology

Volumn 46, Issue 1, 1997, Pages

  Moronuki, Nobuyuki ^a   Furukawa, Yuji ^a  

^a TOKYO METROPOLITAN UNIVERSITY   (Japan)

Author keywords

Anisotropic etching; Friction; Micro linear bearing

Indexed keywords

ACTUATORS; ANISOTROPY; BEARING MOUNTINGS; FRICTION; SILICON;

MICROLINEAR MOTION BEARING;

ETCHING;

EID: 0030673962     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0007-8506(07)60796-3     Document Type: Article

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