Vacuum arc ion sources—Micro to macro

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1210-1212

  Macgill, R A ^a   Dickinson, M R ^a   Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

AMP BEAM CURRENTS; DESIGN; ION SOURCES; METALS; MILLI AMP BEAM CURRENTS; PERFORMANCE; VACUUM SYSTEMS

Indexed keywords

EID: 43849111094     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146734     Document Type: Conference Paper

References (9)

1. Vacuum Arcs—Theory and Application, edited by J. M. Lafferty (Wiley, New York, 1980).
2. I. G. Brown, Rev. Sci. Instrum. 10, 3061 (1994).RSINAK
3. R. A. MacGill, I. G. Brown, and J. E. Galvin, Rev. Sci. Instrum. 61, 580 (1990).RSINAK
4. I. G. Brown, J. E. Galvin, R. A. MacGill, and R. T. Wright, Appl. Phys. Lett. 49, 1019 (1986).APPLAB
5. I. G. Brown, S. Anders, M. R. Dickinson, P. B. Fojas, and R. A. MacGill, Rev. Sci. Instrum. 65, 1260 (1994).RSINAK
6. I. G. Brown, M. R. Dickinson, J. E. Galvin, and R. A. MacGill, Rev. Sci. Instrum. 63, 2417 (1992).RSINAK
7. I. G. Brown, J. E. Galvin, and R. A. MacGill, Rev. Sci. Instrum. 61, 577 (1990).RSINAK
8. E. M. Oks, I. G. Brown, M. R. Dickinson, R. A. MacGill, H. Emig, P. Spädtke, and B. H. Wolf, Appl. Phys. Lett. 67, 200 (1995).APPLAB
9. E. M. Oks, I. G. Brown, M. R. Dickinson, and R. A. MacGill, Upgrade of a Vacuum Arc Ion Source Using a Strong Pulsed Magnetic Field, paper presented at this meeting.