Repetitively pulsed vacuum arc ion and plasma sources and new methods of ion and ion-plasma treatment of materials

Surface and Coatings Technology

Volumn 96, Issue 1, 1997, Pages 9-15

  Ryabchikov, Alexander I ^a  

^a Nuclear Physics Institute   (Russian Federation)

Author keywords

Ion and plasma sources; Ion implantation; Plasma deposition of coatings; Vacuum arc

Indexed keywords

COATINGS; COMPOSITION; DEPOSITION; FILTRATION; ION BEAMS; ION IMPLANTATION; IONS; PLASMA SOURCES; PLASMAS; SURFACE TREATMENT;

MICROPARTICLE FRACTION; PLASMA DEPOSITION; PLASMA FLUX; PULSED BEAM SEQUENCES; PULSED VACUUM ARC ION SOURCES;

ION SOURCES;

EID: 0031551657     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00091-1     Document Type: Article

References (31)

1. A.A. Plyutto, V.N. Ryzhkov, A.T. Kapin, Sov. Phys. JETF 20 (1965) 328.
2. G.P. Bagenov, S.P. Bugaev, G.P. Erohin et, V simposium po silnotochnoi electronike, Tez. Dokl. Tomsk (Russia) 2 (1984) 93.
3. A.N. Didenko, Ya.E. Krasik, A.I. Ryabchikov, S.N. Volkov, Pisma Zh. Tekh. Rhys.(Russia) 4 (1984) 112.
4. I.G. Brown, J.E. Galvin, R.A. MacGill, Appl. Phys. Lett. 47 (1985) 358.
5. R. Adler, S. Picreau, Nucl. Instrum. Methods B 6 (1985) 123.
6. L.K. Len, C. Burhart, G.W. Cooper, HumphrisS., Jr., M. Savage, D.M. Woodall, IEEE Trans. Plasma Sci. PS-14 (1986) 256.
7. Z. Hiaoji, Z. Fengsheng, Z. Huixing, Rev. Sci. Instrum. 63 (1992) 2431.
8. S.P. Bugaev, A.G. Nikolaev, E.M. Oks, Rev, Sci. Instrum. 63 (1992) 2422.
9. J.R. Treglio, A. Tian, A.J. Perry, Surf. Coat. Technol. 62 (1993) 438.
10. A.I. Ryabchikov, R.A. Nasyrov, Rev. Sci. Instrum. 63 (1992) 2428.
11. A.I. Ryabchikov, R.A. Nasyrov, Poverhnost. Physika Himia, Mehanika (Russia) 3 (1992) 98.
12. A.I. Ryabchikov, R.A. Nasyrov, A.A. Kompaniets, Proceedings of the International Conference on Ion Implantation and Ion Beam Equipment, Elenite, Bulgaria, 1990, p. 377.
13. A.I. Ryabchikov, Rev. Sci. Instrum. 61 (1990) 641.
14. N.M. Arzubov, S.V. Dektjarev, A.I. Ryabchikov, Prib. Techn. Exp. (Russia) 1 (1991) 171.
15. A.I. Ryabchikov, N.M. Arzubov, R.A. Nasyrov, J. Tech. Fis. ( Russia) 60 (1990) 106.
16. N.M. Arzubov, G.P. Isaev, A.I. Ryabchikov, Prib. Tech. Exp. (Russia) 5 (1988) 28.
17. N.M. Arzubov, G.P. Isaev, A.I. Ryabchikov, Izvest. Vusov. Fis. (Russia) 8 (1989) 68.
18. A.I. Ryabchikov, I.B. Stepanov, S.V. Dektyarev, Abstracts of the 5th International Conference of Ion Sources, Beijing, China, 1993, p. 44.
19. A.I. Ryabchikov, I.B. Stepanov, 3 Konferentsia po modificatsii svoistv konstruksionych materialov puchkami zarjashenych chastitz, Tez. Dokl., Tomsk (Russia) 1 (1994) 112.
20. A.I. Ryabchikov, N.M. Arzubov, E.I. Lukonin, 1 Konferentsia po modificatsii svoistv konstruktsionych materalov puchkami zarjashenych chastits, Tez. Dokl., Tomsk (Russia) 1 (1988) 17.
21. A.I. Ryabchikov, N.M. Arzubov, N.A. Vasilyev et al., Proceedings of the International Conference on Ion Implantation and Ion Beam Equipment, Elenite, Bulgaria, 1990, p. 327.
22. A.I. Ryabchikov, N.M. Arzubov, N.A. Vasilyev et al., Nucl. Instrum. Methods Phys. Res. B 59/60 (1991) 124.
23. A.I. Ryabchikov, R.A. Nasyrov, Nucl. Instrum. Methods. Phys. Res. B 61 (1991) 48.
24. A.I. Ryabchikov, E.I. Lukonin, D.A. Karpov, 9 Simposium po silnotochnoi electronike, Tes. Dokl. Ekaterinburg (Russia) 3 (1992) 86.
25. A.I. Ryabchikov, S.V. Dektyarev, IV Konferentsia po modificatsii svoistv konstruktsionnych materyalov puchkami zarjashennych chastits, Tez. Docl., Tomsk (Russia) 93 (1996).
26. A.I. Ryabchikov, I.B. Stepanov (see Ref. [25]) 29 (1996).
27. A.I. Ryabchikov, S.V. Dektjarev, I.E. Stepanov, Rev. Sci. Instrum. v. 65 N10 (1994) 3126.
28. A.I. Morozov, Dokl. Akad. Nauk (Russia) 163 (1965) 1363.
29. I.S. Abramov, V.A. Andreev, V.T. Barchenko, Izvestiya Vuzov Fizika (Russia) 3 (1994) 121.
30. I.I. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, Sov. J. Plasma Bhys. 4 (1978) 425.
31. I.I. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, Fiz. Plazma 4 (1978) 758.