Lattice substitution of phosphorous in diamond by Mev ion implantation and pulsed laser annealing

New Diamond and Frontier Carbon Technology

Volumn 6, Issue 6, 1996, Pages 351-358

  Prawer, Steven ^a   Jamieson, David Norman ^a   Walker, Russell John ^a   Lee, Kin Kiong ^b   Watt, Frank ^b   Kalish, Rafi ^c  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Diamond; Doping; Ion implantation; Laser annealing; Nuclear microprobe

Indexed keywords

EID: 3142645597     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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2. S. Prawer: Diamond and Related Materials 4 (1995) 862.
3. S. Prawer, D. N. Jamieson and R. Kalish: Phys. Rev. Lett. 69 (1992) 2991.
4. J. F. Prins: Mat. Sci. Reports 7 (1992) 271.
5. S. Prawer, D. N. Jamieson, S. P. Dooley, P. Spizziri, K. Ghiggino and R. Kalish: Mat. Res. Soc. Proc. 235 (1992) 431.
6. M. G. Allen, S. Prawer, D. N. Jamieson and R. Kalish: Appl. Phys. Lett. 63 (1993) 2062.
7. D. N. Jamieson, R. A. Brown, C. G. Ryan, and J. S. Williams: Nucl. Inst. Meth. Phys. Res. 54 (1991) 213.
8. M. B. H. Breese, D. N. Jamieson and P. J. C. King: Materials Analysis Using a Nuclear Microprobe (John Wiley and Sons, New York, 1996)
9. R. Singh and J. Viatella: Simulation of Laser Interaction with Materials (SLIM), University of Florida (1992), unpublished.