Preliminary results on a silicon gyrometer based on acoustic mode coupling in small cavities

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 347-354

  Bourouina, Tarik ^a,b,e,f,g   Exertier, Anne ^a,g,h   Spirkovitch, Serge ^a,h,i,j,k   Chaumet, Bernard ^c,l,m,n   Pleska, Eric ^c,d,i,o,p  

^a ESIEE PARIS   (France)

^b CNRS   (France)

^c Sextant Avionique ^*  (France)

^d Ministere de la Defense de Francaise   (France)

^e University of Algiers   (Algeria)

^f UNIVERSITÉ PARIS SACLAY   (France)

^g UNIVERSITÉ PARIS EST CRÉTEIL   (France)

^h Ecl Sup d'Ing Electrotechnique E   (France)

ⁱ UNIV GRENOBLE ALPES   (France)

^j THALES   (France)

^k Microelectronics Department   (France)

^l ARTS ET MÉTIERS PARISTECH   (France)

^m Ecl Sup Techniques Aeronautiques   (France)

ⁿ Sextant Avionique Company   (France)

^o French Ministry of Defense   (France)

^p Sensors and Microsystems Division

more..

Author keywords

Gyroscopes; Microphones; Silicon sensors

Indexed keywords

ACOUSTIC WAVES; FABRICATION; FINITE ELEMENT METHOD; GYROSCOPES; MATHEMATICAL MODELS; MECHANICAL VARIABLES MEASUREMENT; MICROPHONES; MODAL ANALYSIS; NATURAL FREQUENCIES; SILICON;

ACOUSTIC GYROMETER; ACOUSTIC MODE COUPLING; SILICON GYROMETER;

SILICON SENSORS;

EID: 0031365931     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650132     Document Type: Article

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