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Volumn , Issue , 1991, Pages 270-273
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Improved IC-compatible piezoelectric microphone and CMOS process
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
DIAPHRAGMS;
ELECTRONICS PACKAGING;
INTEGRATED CIRCUITS, CMOS;
PIEZOELECTRIC DEVICES;
SILICON NITRIDE - CHEMICAL VAPOR DEPOSITION;
DICED MICROPHONE CHIPS;
MICROPHONE SENSITIVITY;
PIEZOELECTRIC MICROPHONE;
ZINC OXIDE PIEZOELECTRIC FILM;
MICROPHONES;
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EID: 0026370252
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (45)
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References (5)
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