Via-hole addressed TFT and process for large-area a-Si:H electronics

Materials Research Society Symposium - Proceedings

Volumn 467, Issue , 1997, Pages 869-874

  Gleskova, H ^a   Wagner, S ^a   Shen, D S ^a  

^a PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; FABRICATION; GATES (TRANSISTOR); SUBSTRATES;

AMORPHOUS SILICON THIN FILM TRANSISTORS; ELECTROPHOTOGRAPHIC TONER MASKS;

THIN FILM TRANSISTORS;

EID: 0031375783     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-467-869     Document Type: Conference Paper

References (5)