The effect of substrate surface roughness on GaN growth using MOCVD process

Journal of Electronic Materials

Volumn 26, Issue 10, 1997, Pages 1098-1102

  Kum, Dongwha ^a   Byun, Dongjin ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

AFM roughness; GaN buffer layer; Nitridation

Indexed keywords

ALUMINA; ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; FILM GROWTH; LIGHT EMITTING DIODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; PHOTOLUMINESCENCE; SEMICONDUCTOR GROWTH; SEMICONDUCTOR LASERS; SUBSTRATES; SURFACE ROUGHNESS;

BUFFER LAYERS; GALLIUM NITRIDE; NITRIDATION;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0031257382     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-997-0001-3     Document Type: Article

References (16)

1. S. Strite and H. Morkoç, J. Vac. Sci. Tech. B 10, 1237 (1992).
2. I. Akasaki and H. Amano, J. Electrochem. Soc. 141, 2266 (1994).
3. R.F. Davis, Phys. B 185, 1 (1993).
4. D. Byun, G. Kim, D. Lim, D. Lee, I.-H. Choi, D. Park and D.-W. Kum, Thin Solid Films 289, 256 (1996).
5. H. Amano, N. Sawaki, I. Akasaki and Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986).
6. S. Nakamura, Jpn. J. Appl. Phys. 30, L1705 (1991).
7. K. Masu, Y. Nakamura, T. Yamazaki, T. Shibata, M. Takashi and K. Tsubouchi, Jpn. J. Appl. Phys. 34, L760 (1995).
8. K. Uchida, A. Watanabe, F. Yano, M. Kouguchi, T. Tanaka and S. Minagawa, J. Appl. Phys. 79, 3487 (1996).
9. K. Maier, J. Schneider, I. Akasaki and H. Amano, Jpn. J. Appl. Phys. 32, L846 (1993).
10. K. Uchida, A. Watanabe, F. Yano and M. Kouguchi, Proc. Inter. Symp. on Blue Laser and Light Emitting Diodes, Chiba University, Tokyo, Ohmsha Ltd, 48 (1996).
11. B-C. Chung and M. Gershenzon, J. Appl. Phys. 72, 651 (1992).
12. R. Dingle, D.D. Sell, S.E. Stokowski and M. Ilegems, Phys. Rev. B 4, 1211 (1971).
13. N. Grandjean, J. Massies and M. Leroux, Appl. Phys. Lett. 69, 2071 (1996).
14. S. Keller, B.P. Keller, Y.-F Wu, B. Heying, J.S. Speck, U.K. Mishra and S.P. DenBaars, Appl. Phys. Lett. 68, 1525 (1996).
15. Dongjin Byun and Dongwha Kum, unpublished work.
16. X. J. Ning, F.R. Chien, P. Pirouz, J.W. Yang and M. Asif Khan, J. Mater. Res. 11 (3), 580 (1996).