Expérimental investigation of atmospheric pressure nonequilibrium plasma chemistry

IEEE Transactions on Plasma Science

Volumn 25, Issue 5, 1997, Pages 1042-1051

  Kruger, Charles H ^a   Owano, Thomas G ^a   Laux, Christophe O ^a  

^a Stanford University   (United States)

Author keywords

Air plasmas; Atmospheric pressure plasmas; CVD; Diamond materials devices; Laser measurements; Optical spectroscopy; Plasma chemistry; Plasma measurements

Indexed keywords

CHEMICAL VAPOR DEPOSITION; IONIZATION OF GASES; PLASMA APPLICATIONS; PLASMA COLLISION PROCESSES; PLASMA STABILITY; SPECTROSCOPY; THERMODYNAMIC STABILITY;

MAXWELL BOLTZMANN EQUILIBRIUM; PLASMA CHEMISTRY;

PLASMAS;

EID: 0031248411     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.649624     Document Type: Article

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