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Volumn 259, Issue 5102, 1993, Pages 1726-1729
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Boundary layer profiles in plasma chemical vapor deposition
a a a b a a |
Author keywords
[No Author keywords available]
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Indexed keywords
BOUNDARY LAYERS;
CHEMICAL VAPOR DEPOSITION;
DIAMONDS;
SPECTROSCOPIC ANALYSIS;
SUBSTRATES;
BOUNDARY LAYER PROFILES;
NONLINEAR OPTICAL SPECTROSCOPY;
PLASMA CVD;
PLASMAS;
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EID: 0027555769
PISSN: 00368075
EISSN: None
Source Type: Journal
DOI: 10.1126/science.259.5102.1726 Document Type: Article |
Times cited : (60)
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References (25)
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