Diamond film synthesis on Mo in thermal RF plasma

Diamond and Related Materials

Volumn 1, Issue 2-4, 1992, Pages 255-261

  Hernberg, R ^a   Lepisto T ^a   Mantyla T ^a   Stenberg, T ^a   Vattulainen, J ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003418851     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(92)90035-M     Document Type: Article

References (10)

1. Diamond and diamondlike films: Deposition processes and properties
2. Rapid Growth of Diamond Films by Arc Discharge Plasma CVD