Surface and layer state of thin Au-Al layers after high-energy ion irradiation measured by RBS, scanning ion microprobe and SEM

Surface and Interface Analysis

Volumn 25, Issue 11, 1997, Pages 889-895

  Markwitz, A ^a,b   Demortier, G ^a  

^a UNIVERSITY OF NAMUR   (Belgium)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

In situ RBS, Au Al interdiffusion; Ion irradiation; Scanning high energy ion microscopy; Voids

Indexed keywords

ALUMINUM; EVAPORATION; GOLD; INTERDIFFUSION (SOLIDS); ION BOMBARDMENT; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE STRUCTURE; THIN FILMS;

SCANNING HIGH ENERGY ION MICROSCOPY;

METALLIC SUPERLATTICES;

EID: 0031247796     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1096-9918(199710)25:11<889::aid-sia312>3.0.co;2-5     Document Type: Article

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