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Volumn 248-249, Issue , 1997, Pages 163-166
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Depth resolved oxygen analysis at the interfaces of Au-Al layers
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Author keywords
Au Al Layers; Backscattering Spectroscopy; Interface Behaviour; Ion Beam Bombardment; Oxygen Analysis
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Indexed keywords
ALUMINUM;
GOLD;
INTERDIFFUSION (SOLIDS);
INTERFACES (MATERIALS);
ION BEAMS;
ION BOMBARDMENT;
OXYGEN;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SUBSTRATES;
DEPTH RESOLVED OXYGEN ANALYSIS;
METALLIC SUPERLATTICES;
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EID: 0030711432
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.248-249.163 Document Type: Article |
Times cited : (8)
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References (15)
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