Preparation of probe tips with well-defined spherical apexes for quantitative scanning force spectroscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1527-1530

  Schwarz, U D ^a   Kostet P ^a   Wiesendanger, R ^a  

^a UNIVERSITY OF HAMBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTRON MICROSCOPES; FRICTION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON BEAM DEPOSITION PROCESS; SCANNING FORCE MICROSCOPY; SILICON CANTILEVERS; SPHERICAL APEXES;

ATOMIC FORCE MICROSCOPY;

EID: 0031186198     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589488     Document Type: Article

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