-
1
-
-
0029535875
-
-
5 capacitors' dielectric material for Giga-bit DRAMs, IEDM, pp. 111-114, 1995.
-
(1995)
5 Capacitors' Dielectric Material for Giga-bit DRAMs, IEDM
, pp. 111-114
-
-
Ohji, Y.1
Matsui, Y.2
Itoga, T.3
Hirayama, M.4
Sugawara, Y.5
Torii, K.6
Miki, H.7
Nakata, M.8
Asano, I.9
Lijima, S.10
Kawarnoto, Y.11
-
2
-
-
0029547112
-
-
Y. S. Park, D. H. Ko, C. S. Hwang, C. J. Kang, K. Y. Lee, J. S. Kirn, J. K. Park, B. H. Roh, J. Y. Lee, B. C. Kirn, J. H. Lee, K. N. Kirn, J. W. Park, and J. G. Lee
-
K. P. Lee, Y. S. Park, D. H. Ko, C. S. Hwang, C. J. Kang, K. Y. Lee, J. S. Kirn, J. K. Park, B. H. Roh, J. Y. Lee, B. C. Kirn, J. H. Lee, K. N. Kirn, J. W. Park, and J. G. Lee, A process technology for 1 Giga-bit DRAM, IEDM, pp. 907-910, 1995.
-
(1995)
A Process Technology for 1 Giga-bit DRAM, IEDM
, pp. 907-910
-
-
Lee, K.P.1
-
3
-
-
0029543660
-
-
Y. Nishioka, K. Shinozawa, T. Oishi, K. Kanamoto, Y. Tokuda, H. Sumitani, S. Aya, H. Yabe, K. Itoga, T. Hifumi, K. Marumoto, T. Kuroiwa, T. Kawahara, K. Nishikawa, T. Oomori, T. Fujino, S. Yamamoto, S. Uzawa, M. Kimita, M. Nunoshita, and H. Abe, Giga-bit scale DRAM cell with new simple Ru/(Ba, Sr)TiO3/Ru stacked capacitors using X-ray lithography, IEDM, pp. 903-906, 1995.
-
Y. Nishioka, K. Shinozawa, T. Oishi, K. Kanamoto, Y. Tokuda, H. Sumitani, S. Aya, H. Yabe, K. Itoga, T. Hifumi, K. Marumoto, T. Kuroiwa, T. Kawahara, K. Nishikawa, T. Oomori, T. Fujino, S. Yamamoto, S. Uzawa, M. Kimita, M. Nunoshita, and H. Abe, Giga-bit scale DRAM cell with new simple Ru/(Ba, Sr)TiO3/Ru stacked capacitors using X-ray lithography, IEDM, pp. 903-906, 1995.
-
-
-
-
4
-
-
18544401526
-
-
A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa, T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata, and H. Abe, Novel stacked capacitor technology for 1 Giga-bit DRAMs with CVD-(Ba, Sr)TiO3 thin films on a thick storage node of Ru, IEDM, pp. 115-118, 1995.
-
A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa, T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata, and H. Abe, Novel stacked capacitor technology for 1 Giga-bit DRAMs with CVD-(Ba, Sr)TiO3 thin films on a thick storage node of Ru, IEDM, pp. 115-118, 1995.
-
-
-
-
5
-
-
0029491604
-
-
2/Ru/TiN/TiSistorage nodes for Gbitscale DRAMs, IEDM, pp. 119-122, 1995.
-
(1995)
2/Ru/TiN/TiSiStorage Nodes for Gbitscale DRAMs, IEDM, Pp. 119-122
-
-
Yamamichi, S.1
Lesaicherre, P.-Y.2
Yamagichi, H.3
Takemura, K.4
Sone, S.5
Yabuta, H.6
Sato, K.7
Tamura, T.8
Nakajima, K.9
Ohnishi, S.10
Tokashiki, K.11
Hayashi, Y.12
Kalo, Y.13
Miyasaka, Y.14
Yoshida, M.15
Ono, H.16
-
7
-
-
0029390445
-
-
Y. Fukuda, K. Aoki, K. Numata, and A. Nishimura, Temperature dependence of dielectric absorption current of SrTiOs t thin-film capacitor, Jpn. J. Appl. Phys., vol. 34 pp. L1291-L1292, 1995.
-
(1995)
Temperature Dependence of Dielectric Absorption Current of SrTiOs T Thin-film Capacitor, Jpn. J. Appl. Phys.
, vol.34
-
-
Fukuda, Y.1
Aoki, K.2
Numata, K.3
Nishimura, A.4
-
8
-
-
0028396035
-
-
T. Horikawa, N. Mikami, H. Ito, Y. Ohno, T. Makita, and K. Sato, (Ba0.75Sr0.2s)TiO3 films for 256 Mbit DRAM, IEICE Trans. Electron., vol. E77-C, pp. 385391, 1994.
-
(Ba0.75Sr0.2s)TiO3 Films for 256 Mbit DRAM, IEICE Trans. Electron., Vol. E77-C, Pp. 385391, 1994.
-
-
Horikawa, T.1
Mikami, N.2
Ito, H.3
Ohno, Y.4
Makita, T.5
Sato, K.6
-
9
-
-
33746188278
-
-
Nov.
-
3 thin films, the Seventh US-Japan Seminar on Dielectric and Piezoelectric Ceramics Program Summary and Extended Abstracts, Tsukuba, Japan, pp. 24-27, Nov. 1995.
-
(1995)
Dielectric Properties of (Ba, Sr)TiO
, vol.3
, pp. 24-27
-
-
Horikawa, T.1
Makita, T.2
Kuroiwa, T.3
Mikami, N.4
-
10
-
-
0029370884
-
-
T. Horikawa, T. Makita, T. Kuroiwa, and N. Mikami, Dielectric relaxation of (Ba, Sr)TiO3 thin films, Jpn. J. Appl. Phys., vol. 34, pp. 5478-5482, 1995.
-
(1995)
Dielectric Relaxation of (Ba, Sr)TiO
, vol.3
, Issue.34
, pp. 5478-5482
-
-
Horikawa, T.1
Makita, T.2
Kuroiwa, T.3
Mikami, N.4
-
11
-
-
33746204916
-
-
Ohmsha, Tokyo
-
Y. Inuishi, T. Nakajima, K. Kawabe, and M. leda, Yudentai Genshoron (Dielectric Phenomenology), p. 349, Ohmsha, Tokyo, 1973.
-
(1973)
Yudentai Genshoron (Dielectric Phenomenology)
, pp. 349
-
-
Inuishi, Y.1
Nakajima, T.2
Kawabe, K.3
Leda, M.4
-
12
-
-
33746235327
-
-
Sept.
-
B. -T. Jang, D. -H. Kwak, S. -Y. Cha, S. -H. Lee, and H. C. Lee, A simple method for characterizing highfrequency properties of BST thin film capacitors, Abstracts of International Symposium on Application of Ferroelectric Thin Films, Hamamatsu, Japan, p. 11, Sept. 1996.
-
(1996)
A Simple Method for Characterizing Highfrequency Properties of BST Thin Film Capacitors, Abstracts of International Symposium on Application of Ferroelectric Thin Films, Hamamatsu, Japan
, pp. 11
-
-
Jang, B.T.1
Kwak, D.H.2
Cha, S.Y.3
Lee -H, S.4
Lee C, H.5
-
14
-
-
0030232826
-
-
3 thin-film capacitor, Jpn. J. Appl. Phys., vol. 35, pp. 5178-5180, 1996.
-
(1996)
Origin of Dielectric Relaxation Observed for Bao.sSro.
, vol.5
, Issue.35
, pp. 5178-5180
-
-
Fukuda, Y.1
Numata, K.2
Aoki, K.3
Nishimura, A.4
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