메뉴 건너뛰기




Volumn E80-C, Issue 7, 1997, Pages 1043-1052

Influence of the relaxation current in baxsr(1-x)tio3 thin film capacitors on dram operation

Author keywords

BST; Cell capacitor dielectric; Divergence; Power law; Relaxation current

Indexed keywords

CAPACITORS; EQUIVALENT CIRCUITS; INTEGRAL EQUATIONS; ITERATIVE METHODS; LEAKAGE CURRENTS; MATHEMATICAL TRANSFORMATIONS; THIN FILMS;

EID: 0031185844     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (4)

References (14)
  • 2
    • 0029547112 scopus 로고
    • Y. S. Park, D. H. Ko, C. S. Hwang, C. J. Kang, K. Y. Lee, J. S. Kirn, J. K. Park, B. H. Roh, J. Y. Lee, B. C. Kirn, J. H. Lee, K. N. Kirn, J. W. Park, and J. G. Lee
    • K. P. Lee, Y. S. Park, D. H. Ko, C. S. Hwang, C. J. Kang, K. Y. Lee, J. S. Kirn, J. K. Park, B. H. Roh, J. Y. Lee, B. C. Kirn, J. H. Lee, K. N. Kirn, J. W. Park, and J. G. Lee, A process technology for 1 Giga-bit DRAM, IEDM, pp. 907-910, 1995.
    • (1995) A Process Technology for 1 Giga-bit DRAM, IEDM , pp. 907-910
    • Lee, K.P.1
  • 3
    • 0029543660 scopus 로고    scopus 로고
    • Y. Nishioka, K. Shinozawa, T. Oishi, K. Kanamoto, Y. Tokuda, H. Sumitani, S. Aya, H. Yabe, K. Itoga, T. Hifumi, K. Marumoto, T. Kuroiwa, T. Kawahara, K. Nishikawa, T. Oomori, T. Fujino, S. Yamamoto, S. Uzawa, M. Kimita, M. Nunoshita, and H. Abe, Giga-bit scale DRAM cell with new simple Ru/(Ba, Sr)TiO3/Ru stacked capacitors using X-ray lithography, IEDM, pp. 903-906, 1995.
    • Y. Nishioka, K. Shinozawa, T. Oishi, K. Kanamoto, Y. Tokuda, H. Sumitani, S. Aya, H. Yabe, K. Itoga, T. Hifumi, K. Marumoto, T. Kuroiwa, T. Kawahara, K. Nishikawa, T. Oomori, T. Fujino, S. Yamamoto, S. Uzawa, M. Kimita, M. Nunoshita, and H. Abe, Giga-bit scale DRAM cell with new simple Ru/(Ba, Sr)TiO3/Ru stacked capacitors using X-ray lithography, IEDM, pp. 903-906, 1995.
  • 4
    • 18544401526 scopus 로고    scopus 로고
    • A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa, T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata, and H. Abe, Novel stacked capacitor technology for 1 Giga-bit DRAMs with CVD-(Ba, Sr)TiO3 thin films on a thick storage node of Ru, IEDM, pp. 115-118, 1995.
    • A. Yuuki, M. Yamamuka, T. Makita, T. Horikawa, T. Shibano, N. Hirano, H. Maeda, N. Mikami, K. Ono, H. Ogata, and H. Abe, Novel stacked capacitor technology for 1 Giga-bit DRAMs with CVD-(Ba, Sr)TiO3 thin films on a thick storage node of Ru, IEDM, pp. 115-118, 1995.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.