Capacitively activated torsional high-Q resonator

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 132-135

  Buser, R A ^a   de Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; ELECTROSTATIC DEVICES; SENSORS--SILICON SENSORS;

HIGH-Q RESONATOR; SENSING ELEMENTS; SILICON RESONANT STRUCTURES; TORSIONAL STRUCTURE;

RESONATORS;

EID: 0025684488     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)