Squeeze film damping in microelectromechanical systems

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 40, Issue , 1992, Pages 149-160

  Zhang, L ^a   Cho, Dan ^a   Shiraishi, H ^a   Trimmer, W ^a  

^a PRINCETON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; FILMS; LUBRICATION; MATHEMATICAL MODELS; NUMERICAL ANALYSIS;

ALTERNATING DIRECTION IMPLICIT SCHEME; SQUEEZE FILM DAMPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0026972524     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)