Methodologies for in situ pyrometric interferometry monitoring and control of molecular beam epitaxy growth of AlAs/GaAs distributed Bragg reflectors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2151-2156

  Lee, H P ^a   Li, Y ^a   Sato, D L ^a   Zhou, J J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343266781     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588888     Document Type: Article

References (13)

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