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Volumn 144, Issue 5, 1997, Pages

Fabrication of single crystalline SiC layer on high temperature glass

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROCHEMISTRY; GLASS; ION BOMBARDMENT; MICROCRACKS; SINGLE CRYSTALS;

ANODIC BONDING; SILICON CARBIDE WAFERS;

SILICON CARBIDE;

EID: 0031139436 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1837628 Document Type: Article

Times cited : (20)

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