Surface roughness with nanometer-scale Ag particles generated by ion implantation

Analytica Chimica Acta

Volumn 350, Issue 1-2, 1997, Pages 209-220

  Pham, M T ^a   Matz, W ^a   Seifarth, H ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Atomic force microscopy; Ion implantation; Silver; Surface roughness; X ray diffraction

Indexed keywords

GLASS; SILICON DERIVATIVE; SILICON DIOXIDE; SILVER; TANTALUM;

ARTICLE; ATOMIC FORCE MICROSCOPY; DISPERSION; ENERGY; PARTICLE SIZE; PRIORITY JOURNAL; SURFACE PROPERTY; X RAY DIFFRACTION;

EID: 0030928031     PISSN: 00032670     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0003-2670(97)00294-8     Document Type: Article

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