SCOPUS 정보 검색 플랫폼

Journal of Crystal Growth

Volumn 170, Issue 1-4, 1997, Pages 203-207

Growth monitoring by reflectance anisotropy spectroscopy in MOVPE reactors for device fabrication

(7) Kurpas, P a Rumberg, A b Weyers, M a Knorr, K b Bergunde, T a Sato, M a,c Richter, W b

a LEIBNIZ INSTITUT FÜR HÖCHSTFREQUENZTECHNIK (Germany)

b TECHNISCHE UNIVERSITÄT BERLIN (Germany)

c Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; EPITAXIAL GROWTH; HETEROJUNCTION BIPOLAR TRANSISTORS; LIGHT REFLECTION; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR GROWTH;

MOVPE REACTORS; REFLECTANCE ANISOTROPY SPECTROSCOPY;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0030704061 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(96)00622-7 Document Type: Article

Times cited : (7)

References (12)

1
- 0029277882
- D.E. Aspnes, Mater. Sci. Eng. B 30 (1995) 109.
- (1995) Mater. Sci. Eng. B , vol.30 , pp. 109
- Aspnes, D.E.¹

2
- 0030564341
- W. Richter and J.-T. Zettler. Appl. Surf. Sci. 100/101 (1996) 465.
- (1996) Appl. Surf. Sci. , vol.100-101 , pp. 465
- Richter, W.¹ Zettler, J.-T.²

3
- 0028761892
- P. Kurpas, J. Jönsson, W. Richter, D. Gutsche, M. Pristovsek and M. Zorn. J. Crystal Growth 145 (1994) 36.
- (1994) J. Crystal Growth , vol.145 , pp. 36
- Kurpas, P.¹ Jönsson, J.² Richter, W.³ Gutsche, D.⁴ Pristovsek, M.⁵ Zorn, M.⁶

4
- 21544472489
- R. Arès. C.A. Tran and S.P. Watkins. Appl. Phys. Lett. 67 (1995) 1576.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1576
- Arès, R.¹ Tran, C.A.² Watkins, S.P.³

5
- 0028762036
- K. Ploska, J.-Th. Zettler, W. Richter, J. Jönsson, F. Reinhardt, J. Rumberg, M. Pristovsek, M. Zorn, D. Westwood and R.H. Williams, J. Crystal Growth 145 (1994) 44.
- (1994) J. Crystal Growth , vol.145 , pp. 44
- Ploska, K.¹ Zettler, J.-Th.² Richter, W.³ Jönsson, J.⁴ Reinhardt, F.⁵ Rumberg, J.⁶ Pristovsek, M.⁷ Zorn, M.⁸ Westwood, D.⁹ Williams, R.H.¹⁰

6
- 0039583732
- J.S. Luo, J.M. Olson, K.A. Bertness, M.E. Raikh and V. Tsiper, J. Vac. Sci. Technol. B 12 (1994) 2552.
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 2552
- Luo, J.S.¹ Olson, J.M.² Bertness, K.A.³ Raikh, M.E.⁴ Tsiper, V.⁵

7
- 0026414637
- P.M. Frijlink, J.L. Nicolas, H.P.M.M. Ambrosius, R.W.M. Linders, C. Wauequex and J.M. Marchal. J. Crystal Growth 115 (1991) 203.
- (1991) J. Crystal Growth , vol.115 , pp. 203
- Frijlink, P.M.¹ Nicolas, J.L.² Ambrosius, H.P.M.M.³ Linders, R.W.M.⁴ Wauequex, C.⁵ Marchal, J.M.⁶

8
- 0030653410
- T. Bergunde, M. Dauelsberg, L. Kadinski, Y.N. Makaron, M. Weyers, D. Schmitz, G. Strauch and H. Jürgensen, J. Crystal Growth 170 (1997) 66.
- (1997) J. Crystal Growth , vol.170 , pp. 66
- Bergunde, T.¹ Dauelsberg, M.² Kadinski, L.³ Makaron, Y.N.⁴ Weyers, M.⁵ Schmitz, D.⁶ Strauch, G.⁷ Jürgensen, H.⁸

9
- 30244471711
- private communication.
- H. Jürgensen. private communication.
- Jürgensen, H.¹

10
- 0030714772
- P. Kurpas, E. Richter, M. Sato, F. Brunner, D. Gutsche and M. Weyers, J. Crystal Growth 170 (1997) 442.
- (1997) J. Crystal Growth , vol.170 , pp. 442
- Kurpas, P.¹ Richter, E.² Sato, M.³ Brunner, F.⁴ Gutsche, D.⁵ Weyers, M.⁶

11
- 33751221550
- H. Tanaka, E. Colas, I. Kamiya, D.E. Aspnes and R. Bhat. Appl. Phys. Lett. 59 (1991) 3443.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3443
- Tanaka, H.¹ Colas, E.² Kamiya, I.³ Aspnes, D.E.⁴ Bhat, R.⁵

12
- 51249164300
- E. Richter, P. Kurpas, D. Gutsche and M. Weyers, J. Electron, Mater. 24 (1995) 1719.
- (1995) J. Electron, Mater. , vol.24 , pp. 1719
- Richter, E.¹ Kurpas, P.² Gutsche, D.³ Weyers, M.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.