Properties of (Ga0.47In0.53)As epitaxial layers grown by metalorganic vapor phase epitaxy (MOVPE) using alternative arsenic precursors

Journal of Crystal Growth

Volumn 170, Issue 1-4, 1997, Pages 155-160

  Protzmann, H ^a   Hohnsdorf F ^a   Spika, Z ^a   Stolz, W ^a   Gobel E O ^a,b   Muller M ^a   Lorberth, J ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC COMPOUNDS; EPITAXIAL GROWTH; MICROSCOPIC EXAMINATION; PHOTOLUMINESCENCE; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR GROWTH; X RAY DIFFRACTION ANALYSIS;

ARSENIC PRECURSORS; LOW PRESSURE MOVPE;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0030672923     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(96)00640-9     Document Type: Article

References (15)

1. J. Komeno, J. Crystal Growth 145 (1994) 468.
2. G.B. Stringfellow, J. Electron. Mater. 17 (1988) 327.
3. M. Horita, M. Suzuki and Y. Matsushima, J. Crystal Growth 124 (1992) 123.
4. Y. Sakata, T. Nakamura, S. Ae, T. Terakado, Y. Inomoto, T. Torikai and H. Hasumi, J. Electron. Mater. 25 (1996) 401.
5. T. Nakamura, S. Ae, T. Terakado, T. Torikai and T. Uji, J. Electron. Mater. 25 (1996) 457.
6. G. Zimmermann, H. Protzmann, W. Stolz, E.O. Göbel, P. Gimmnich, A. Greiling, J. Lorberth, C. Thalmann and K. Rademann, J. Crystal Growth 124 (1992) 136.
7. G. Zimmermann, Z. Spika, T. Marschner, B. Spill, W. Stolz, E.O. Göbel, P. Gimmnich, J. Lorberth, A. Greiling and A. Salzmann, J. Crystal Growth 145 (1994) 512.
8. H. Protzmann, F. Höhnsforf, Z. Spika, W. Stolz, E.O. Göbel, M. Müller, P. Gimmnich, J. Lorberth, J. Scherb and W. Körber, Proc. 8th IPRM 1996 Schwäbisch Gmünd, Germany (1996) p. 474.
9. A. Greiling, PhD Thesis, Philipps University, Marburg, Germany, 1991.
10. Tzschach and Deylig, Z. Anorg. Allg. Chem. 336 (1965) 36.
11. H. Protzmann, Z. Spika, B. Spill, G. Zimmermann, W. Stolz, E.O. Göbel, P. Gimmnich and J. Lorberth J. Electron. Mater. 25 (1996) 443.
12. Z. Spika, G. Zimmermann, W. Stolz, E.O. Göbel, P. Gimmnich, J. Lorberth, A. Greiling, A. Salzmann, S. Weiss, U. Sudjadi, A. Bock and R. Kassing, J. Crystal Growth 146 (1995) 521.
13. B.I. Miller, M.G. Young, M. Oron, U. Koren and D. Kisker, Appl. Phys Lett. 56 (1990) 1439.
14. S. Ae, T. Terakado, T. Nakamura, T. Torikai and T. Uji, J. Crystal Growth 145 (1994) 852.
15. J. Weber, A. Nowitzki, I. Gyuro and J. Scherb, Proc. 8th IPRM 1996, Schwäbisch Gmünd, Germany (1996) p. 195.