Metalorganic vapor phase epitaxy of InP using the novel P-source ditertiarybutyl phosphine (DitBuPH)

Journal of Electronic Materials

Volumn 25, Issue 3, 1996, Pages 443-448

  Protzmann, H ^a   Spika, Z ^a   Spill, B ^a   Zimmermann, G ^a   Stolz, W ^a   Gobel E O ^a,b   Gimmnich, P ^a   Lorberth, J ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

InP; Metalorganic vapor phase epitaxy (MOVPE); Novel precursors

Indexed keywords

EID: 0347609315     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02666618     Document Type: Article

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