SCOPUS 정보 검색 플랫폼

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 120, Issue 1-4, 1996, Pages 151-155

Ion beam synthesis and recrystallization of amorphous SiGe/SiC structures

(9) Perez Rodriguez A a Romano Rodriguez A a Serre, C a Calvo Barrio, L a Cabezas, R a Morante, J R a Calderer, J b Reuther, H c Skorupa, W c

a UNIVERSITY OF BARCELONA (Spain)

b UNIVERSITAT POLITÈCNICA DE CATALUNYA (Spain)

c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ANNEALING; AUGER ELECTRON SPECTROSCOPY; CRYSTALLIZATION; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MICROSCOPIC EXAMINATION; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DOPING; SILICON CARBIDE; SILICON COMPOUNDS;

GERMANIUM SILICIDE; ION BEAM SYNTHESIS; RECRYSTALLIZATION;

ION IMPLANTATION;

EID: 0030566478 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(96)00498-3 Document Type: Article

Times cited : (3)

References (10)

1
- 0000168868
- C. Serre, L. Calvo-Barrio, A. Pérez-Rodríguez, A. Romano-Rodríguez, J.R. Morante, Y. Pacaud, R. Kögler, V. Heera and W. Skorupa, J. Appl. Phys. 79 (1996) 6907.
- (1996) J. Appl. Phys. , vol.79 , pp. 6907
- Serre, C.¹ Calvo-Barrio, L.² Pérez-Rodríguez, A.³ Romano-Rodríguez, A.⁴ Morante, J.R.⁵ Pacaud, Y.⁶ Kögler, R.⁷ Heera, V.⁸ Skorupa, W.⁹

2
- 21544446451
- J.W. Strane, H.J. Stein, S.R. Lee, B.L. Doyle, S.T. Picraux and J.W. Mayer, Appl. Phys. Lett. 63 (1993) 2786.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2786
- Strane, J.W.¹ Stein, H.J.² Lee, S.R.³ Doyle, B.L.⁴ Picraux, S.T.⁵ Mayer, J.W.⁶

3
- 0000122741
- J.W. Strane, S.R. Lee, H.J. Stein, S.T. Picraux, J.K. Watanabe, J.W. Mayer, J. Appl. Phys. 79 (1996) 637.
- (1996) J. Appl. Phys. , vol.79 , pp. 637
- Strane, J.W.¹ Lee, S.R.² Stein, H.J.³ Picraux, S.T.⁴ Watanabe, J.K.⁵ Mayer, J.W.⁶

4
- 0029386432
- S.C. Jain, H.J. Osten, B. Dietrich, H. Rücker, Semicond. Sci. Technol. 10 (1995) 1289.
- (1995) Semicond. Sci. Technol. , vol.10 , pp. 1289
- Jain, S.C.¹ Osten, H.J.² Dietrich, B.³ Rücker, H.⁴

5
- 0003412161
- Pergamon, New York
- J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1.
- (1985) The Stopping and Range of Ions in Solids , vol.1
- Ziegler, J.F.¹ Biersack, J.P.² Littmark, U.³

6
- 0000191521
- S. Chevacharoenkul, J.R. Ilzhoefer, D. Feijoo, U. Gosële, Appl. Phys. Lett. 58 (1991) 1434.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1434
- Chevacharoenkul, S.¹ Ilzhoefer, J.R.² Feijoo, D.³ Gosële, U.⁴

7
- 0029637533
- J. Menéndez, P. Gopalan, G.S. Spencer, N. Cave, J.W. Strane, Appl. Phys. Lett. 66 (1995) 1160.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1160
- Menéndez, J.¹ Gopalan, P.² Spencer, G.S.³ Cave, N.⁴ Strane, J.W.⁵

8
- 0001657740
- C. Serre, A. Pérez-Rodríguez, A. Romano-Rodríguez, J.R. Morante, R. Kögler, W. Skorupa, J. Appl. Phys. 77 (1995) 2978.
- (1995) J. Appl. Phys. , vol.77 , pp. 2978
- Serre, C.¹ Pérez-Rodríguez, A.² Romano-Rodríguez, A.³ Morante, J.R.⁴ Kögler, R.⁵ Skorupa, W.⁶

9
- 36449003794
- S.M. Prokes, O.J. Glembocki, D.J. Godbey, Appl. Phys. Lett. 60 (1992) 1087.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1087
- Prokes, S.M.¹ Glembocki, O.J.² Godbey, D.J.³

10
- 0030566605
- 1996 E-MRS Spring meeting
- these Proceedings, Strasbourg, France (June 1996)
- A. PérezR2A1GH-Rodríguez, A. Romano-Rodríguez, C. Serre, L. Calvo-Barrio, R. Cabezas, O. González-Varona, J.R. Morante, R. Kögler, W. Skorupa, A. Rodríguez, these Proceedings, 1996 E-MRS Spring Meeting, Strasbourg, France (June 1996), Nucl. Instr. and Meth. B 120 (1996) 173.
- (1996) Nucl. Instr. and Meth. B , vol.120 , pp. 173
- Pérez-Rodríguez, A.¹ Romano-Rodríguez, A.² Serre, C.³ Calvo-Barrio, L.⁴ Cabezas, R.⁵ González-Varona, O.⁶ Morante, J.R.⁷ Kögler, R.⁸ Skorupa, W.⁹ Rodríguez, A.¹⁰

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.