Ion current distribution within a toroidal duct of a filtered vacuum arc deposition system

International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV

Volumn 2, Issue , 1996, Pages 927-931

  Zhitomirsky, V N ^a   Boxman, R ^a   Goldsmith, S ^a  

^a TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; CURRENT DENSITY; DEPOSITION; ELECTRIC ARCS; ELECTRIC CURRENT MEASUREMENT; IONS; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA PROBES; TITANIUM;

ION CURRENT DISTRIBUTION; ION CURRENT LOSS; TOROIDAL DUCT; VACUUM ARC DEPOSITION SYSTEM;

ELECTRIC CURRENT DISTRIBUTION;

EID: 0029715030     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)