A MOSFET-structured Si Tip for Stable Emission Current

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 309-312

  Hirano, Takayuki ^b   Kanemaru, Seigo ^a   Itoh, Junji ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; METALS; MOS DEVICES; MOSFET DEVICES; OXIDE SEMICONDUCTORS; ELECTRIC CURRENT CONTROL; GATES (TRANSISTOR); INTEGRATED CIRCUIT MANUFACTURE; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE STRUCTURES;

'CURRENT; CONTROL GATES; DRAIN REGION; EMISSION CURRENT; FIELD EMITTER TIPS; SIMPLE STRUCTURES; STABLE EMISSIONS;

DRAIN CURRENT; MICROELECTRONICS;

DRAIN CURRENT; FIELD EMITTER ARRAYS; SILICON FIELD EMITTER TIP;

EID: 0030398086     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.553591     Document Type: Conference Paper

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