High-frequency ultrasonic cleaning tank utilizing oblique incidence

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 43, Issue 4, 1996, Pages 531-535

  Hatano, Hajime ^a   Kanai, Sadao ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; HYDROPHONES; PROBES; SEMICONDUCTOR MATERIALS; SUBSTRATES; TANKS (CONTAINERS); ULTRASONIC MEASUREMENT; ULTRASONIC TRANSMISSION; ULTRASONIC WAVES;

ANGLE OF INCIDENCE; OBLIQUE INCIDENCE; SEMICONDUCTOR WAFERS; SOUND PRESSURE; SOUND TRANSMITTIVITY;

ULTRASONIC CLEANING;

EID: 0030195196     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.503712     Document Type: Article

References (10)

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