Mechanisms of Removal of Micron-Sized Particles by High-Frequency Ultrasonic Waves

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 42, Issue 4, 1995, Pages 619-629

  Qi, Quan ^a   Brereton, Giles J ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY LAYERS; PARTICLES (PARTICULATE MATTER); SILICON WAFERS; ULTRASONIC WAVES; VAN DER WAALS FORCES;

ADHESION FORCES; MICRON SIZED PARTICLE REMOVAL MECHANISMS; PARTICLE CLEANING; SOUND PARTICLE INTERACTION;

ULTRASONIC CLEANING;

EID: 0029346331     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.393105     Document Type: Article

References (25)

1. S. Bhattacharya, and K. L. Mittal, “Mechanics of removing glass particulates from a solid surface,” Surf. Technol., vol. 7, pp. 413–425, 1978.
2. R. A. Bowling, “An analysis of particle adhesion on semiconductor surfaces,” J. Electrochem. Assoc., vol. 132, pp. 2208–2214, 1985.
3. R. A. Bowling, “A theoretical review of particle adhesion,” in Particles on Surface-Detection, Adhesion, and Removal, K. L. Mittal, Ed. New York: Plenum Press, 1988.
4. G. J. Brereton and B. A. Bruno, “Manipulation and removal of micron particles by focused acoustic waves,” Int. Video J. Eng. Res., vol. 2, no. 3, 1992.
5. G. J. Brereton and B. A. Bruno, “Particles removal by focused ultrasound,” J. Sound and Vibration, vol. 173, no. 5, p. 683, 1994.
6. D. A. Drew, “The lift force on a null sphere in the presence of a wall,” Chem. Eng. Sci., vol. 43, no. 4, pp. 769–773, 1988.
7. T. L. Geers, and M. Hasheminejad, “Linear analysis of an ultrasonic cleaning problem,” J. Acoust. Soc. Amer., vol. 29, no. 4, p. 669, 1991.
8. A. J. Goldman, R. G. Cox, and H. Brenner, “Slow viscous motion of sphere parallel to a plane wall—II Couette flow,” Chem. Eng. Sci., vol. 22, pp. 653–660, 1967.
9. S. Goren and M. E. O’Neill, “On the hydrodynamic resistance to a particle of a dilute suspension when in the neighborhood of a large obstacle,” Chem. Eng. Sci., vol. 26, pp. 325–338, 1971.
10. J. Israelachvili, Intermolecular and Surface Forces. London: Academic Press, 1992.
11. S. Kim and C. J. Lawrence, “Suspension mechanics for particle contamination control,” Chem. Eng. Sci., vol. 43, pp. 991–1016, 1988.
12. L. V. King, “On the acoustic radiation pressure on spheres,” in Proc. R. Soc. London, Ser. A, vol. 147, p. 212, 1934.
13. H. Krupp, “Particle adhesion theory and experiment,” Advances in Colloid and Interface Sci., vol. 2, pp. 111–239, May 1967.
14. I. I. Kashkoush and A. A. Busnaina, “Recent developments in submi-crometer particle removal,” in Particles on Surfaces 4, K. Mittal, Ed. New York: Plenum, 1993.
15. L. D. Laudau and E. M. Lifshitz, Fluid Mechanics. Oxford: Pergamon, 1987.
16. D. Leighton and A. Acrivos, “The lift on a small sphere touching a plane in the presence of a simple shear flow,” J. Applied Math and Phys., vol. 36, pp. 174–178, 1985.
17. K. L. Mittal, Ed., Particles on Surface-Detection, Adhesion, and Removal. New York: Plenum Press, 1988.
18. W. L. M. Nyborg, “Acoustic streaming,” in Physical Acoustics, W. P. Mason, Ed. New York: Academic Press, 1965, vol. II-Part B, pp. 265–331.
19. L. G. Olson, “Finite element model for ultrasonic cleaning,” J. Sound and Vibration, vol. 126, p. 387, 1988.
20. Q. Qi, “The effect of compressibility on acoustic streaming for a plane travelling waves near a rigid boundary,” J. Acoust. Soc. Amer., vol. 94, no. 2, pp. 1090–1098, 1993.
21. M. B. Ranade, “Adhesion and removal of fine particles on surfaces,” Aerosol Sci. and Technol., vol. 7, pp. 161–176, 1987.
22. S. Shwartzman and A. Mayer, “Megasonic particle removal from solid-state wafers,” RCA Rev., vol. 46, pp. 81–105, 1985.
23. D. Tabor, Gases, Liquids, and Solids and Other States of Matter. New York: Cambridge.
24. T. L. Tolt and D. L. Feke, “Separation of dispersed phases from liquids in acoustically driven chambers,” Chem. Eng. Sci., vol. 48, pp. 527–540, 1993.
25. K. Yosioka and Y. Kawasima, “Acoustic radiation pressure on a compressible sphere,” Acustica, vol. 5, pp. 167–173, 1995.