Metal Fume-Free Welding Technology for Advanced Semiconductor Grade Gas Delivery System

Journal of the Electrochemical Society

Volumn 142, Issue 7, 1995, Pages 2362-2372

  Mizuguchi, Yasumitsu ^b   Miyoshi, Shinji ^a   Shirai, Yasuvuki ^a   Kojima, Tsutomu ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b Osaka Sanso Kogyo Limited ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATION; BUTT WELDING; CORROSION RESISTANCE; DEPOSITION; MANGANESE; MELTING; STAINLESS STEEL; STEEL CORROSION;

ADVANCED SEMICONDUCTOR GRADE GAS DELIVERY SYSTEM; METAL FUME FREE WELDING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029342846     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2044301     Document Type: Article

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