Low outgassing and anticorrosive metal surface treatment for ultrahigh vacuum equipment

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 4, 1990, Pages 3337-3340

  Miki, Nobuhiro ^c   Ohmi, Tadahiro ^a   Morita, Mizuho ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b Osaka Diamond Industrial Co Ltd   (Japan)

^c Hashimoto Chemical Corp   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION; CORROSION PROTECTION; CORROSION RESISTANCE; DEGASSING; METALS; MOISTURE; PASSIVATION; SURFACE CLEANING; SURFACE TREATMENT; ULSI CIRCUITS; ULTRAHIGH VACUUM; VACUUM TECHNOLOGY;

ANTI-CORROSIVE; EXCELLENT CORROSION RESISTANCES; MOLECULAR CONTAMINATION; PASSIVATION PROCESS; STAINLESS STEEL SURFACE; STEEL PASSIVATION; ULTRALARGE SCALE INTEGRATION; VACUUM PROCESSING;

STAINLESS STEEL;

EID: 0041737677     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576546     Document Type: Article

References (6)

1. T. Ohmi, and T. Nitta, Ultra Pure Gas Delivery System. (Institute of Basic Semiconductor Technology Development, Realize, 1986), pp. 332–369.
2. T. Ohmi, T. Okumura, K. Sugiyama, F. Nakahara, and J. Murota, “Out-gas-Free Corrosion-Resistant Surface Passivation of Stainless Steel for Advanced ULSI Processing Equipment,” Electro-Chemical Society 1988 Fall Meeting, Chicago, Extended Abstracts, Vol. 88–102, pp. 579–581.
3. K. Sugiyama, F. Nakahara, T. Okumura, T. Ohmi, and J. Muroota, in Proceedings of the Ninth International Symposium on Contamination Control, Los Angeles 1988, (unpublished), pp. 332–340.
4. N. Miki, M. Maeno, K. Maruhashi, Y. Nakagawa, and T. Ohmi, Abstract, Sixth International Symposium on Passivity, Sappro, Abstract, 1989, pp. 2–3.
5. T. Ohmi, in Proceedings of the Tenth Symposium on ISIAT 86, Tokyo, 1986 (unpublished), p. 709.
6. T. Ohmi, in Proceedings of the Symposium on Ultrahigh Vacuum Materials and Gases, Tokyo, 1987 (unpublished), p. 31.