Evaluation of thermal decomposition characteristics of active specialty gases on various metal surfaces using FT-IR method

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1995, Pages 17-21

  Shirai, Yasuyuki ^a   Lee, Seok kiu ^a   Miyoshi, Shinji ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; CONTAMINATION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GASES; METALS; SURFACE PROPERTIES; SURFACES;

CATALYTIC EFFECT; PASSIVE SURFACES; SPECIALTY GASES;

PYROLYSIS;

EID: 0029529383     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)