Fabrication and characterization of a silicon microvalve

Journal of Microcolumn Separations

Volumn 4, Issue 1, 1992, Pages 13-15

  Emmer, Åsa ^a   Jansson, Mårten ^a   Roeraade, Johan ^a   Lindberg, Ulf ^b   Hök, Bertil ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

micro valve; silicon micromachining

Indexed keywords

EID: 84986849767     PISSN: 10407685     EISSN: 1520667X     Source Type: Journal    
DOI: 10.1002/mcs.1220040104     Document Type: Article

References (4)