Constant flow-rate microvalve actuator based on silicon and micromachining technology.

Volumn , Issue , 1988, Pages 136-139

  Park, Sekwang ^a   Ko, Wen H ^a   Prahl, Joseph M ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIAPHRAGMS; MATHEMATICAL MODELS; SILICON AND ALLOYS -- MACHINING; VALVES AND VALVE GEAR;

CONSTANT FLOW-RATE MICROVALVE ACTUATOR; MICROMACHINING; PROTOTYPE TESTING; RECTANGULAR SILICON VALVE; THIN DIAPHRAGM MICROVALVE;

ACTUATORS;

EID: 0024129795     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)