In situ sensor of spatially resolved optical emission

IEEE Transactions on Plasma Science

Volumn 24, Issue 1, 1996, Pages 111-112

  Buie, M J ^a   Pender, J T P ^a   Holloway, J P ^a   Brake, M L ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COMPUTATIONAL METHODS; ELECTRIC DISCHARGES; ELECTRODES; EMISSION SPECTROSCOPY; INTERPOLATION; IONS; LENSES; LIGHT EMISSION; PLASMA CONFINEMENT; POLYNOMIALS; SIGNAL TO NOISE RATIO;

ARGON EMISSION; GASEOUS ELECTRONICS CONFERENCE REFERENCE CELL; OPTICAL MULTICHANNEL ANALYZER; PONDEROMOTIVE FORCE; SPATIALLY RESOLVED OPTICAL EMISSION SPECTROSCOPY;

PLASMAS;

EID: 0030083739     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.491737     Document Type: Article

References (9)

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