The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

Review of Scientific Instruments

Volumn 65, Issue 1, 1994, Pages 140-154

  Hargis Jr , P J ^a   Greenberg, K E ^a   Miller, P A ^a   Gerardo, J B ^a   Torczynski, J R ^a   Riley, M E ^a   Hebner, G A ^a   Roberts, J R ^b   Olthoff, J K ^b   Whetstone, J R ^b   Van Brunt, R J ^b   Sobolewski, M A ^b   Anderson, H M ^c   Splichal, M P ^c   Mock, J L ^c   Bletzinger, P ^d   Garscadden, A ^d   Gottscho, R A ^e   Selwyn, G ^f   Dalvie, M ^f   Heidenreich, J E ^f   Butterbaugh, Jeffery W ^g   Brake, M L ^h   Passow, M L ^h   Pender, J ^h   Lujan, A ^h   Elta, M E ^h   Graves, D B ⁱ   Sawin, H H ^j   Kushner, M J ^k   Verdeyen, J T ^k   Horwath, R ^l   Turner, T R ^l   more..

^a SANDIA NATIONAL LABORATORIES   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c UNIVERSITY OF NEW MEXICO   (United States)

^d AIR FORCE RESEARCH LABORATORY   (United States)

^e LUCENT TECHNOLOGIES   (United States)

^f IBM T J WATSON RESEARCH CENTER   (United States)

^g IBM   (United States)

^h UNIVERSITY OF MICHIGAN   (United States)

ⁱ University of California   (United States)

^j MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^k UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^l SEMATECH   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449001969     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1144770     Document Type: Article

References (16)