Self-consistent fluid modeling of radio frequency discharges in two dimensions

Applied Physics Letters

Volumn 62, Issue 24, 1993, Pages 3207-3209

  Dalvie, M ^a   Surendra, M ^a   Selwyn, G S ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

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EID: 0000678456     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.109079     Document Type: Article

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