Absolute spatially- and temporally-resolved optical emission measurements of rf glow discharges in argon

Journal of Research of the National Institute of Standards and Technology

Volumn 98, Issue 2, 1993, Pages 159-180

  Djurovic, S ^a   Roberts, J R ^a   Sobolewski, M A ^a   Olthoff, J K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON TRANSPORT PROPERTIES; LIGHT EMISSION; OPTICAL VARIABLES MEASUREMENT; PLASMAS; PRESSURE EFFECTS;

GASEOUS ELECTRONICS; OPTICAL EMISSION; RADIOFREQUENCY GLOW DISCHARGES; SPATIAL PROFILE; TEMPORAL DEPENDENCE;

GLOW DISCHARGES;

EID: 0027558560     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.098.012     Document Type: Article

References (21)