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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 1901-1906

Structural study of YSi1.7 layers formed by channeled ion beam synthesis

(8) Wu, M F a,b Yao, Shude a,b Vantomme, A b Hogg, S b Pattyn, H b Langouche, G b Yang, Qinqing c Wang, Qiming c

a PEKING UNIVERSITY (China)

b KU LEUVEN (Belgium)

c INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012932161 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (9)

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- note
- Unpublished results related to the work in Ref. 20.

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